TiAlN coatings tribology for textile machinery parts
نویسندگان
چکیده
منابع مشابه
A STUDY OF TiAlN COATINGS PREPARED BY RF CO-SPUTTERING
Using the reactive magnetron rf co-sputtering technique and a Ti target partially covered with a small Al plate, TiAlN coatings were made on c-Si in a reactive atmosphere of nitrogen and argon. Coatings were deposited on substrates at 22°C and at 150°C. The substrate temperature notably affected the thickness, crystalline grain size, and hardness of the coatings. We analyzed the dependence of b...
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ژورنال
عنوان ژورنال: Proceedings of the Estonian Academy of Sciences
سال: 2021
ISSN: ['1406-0175', '1736-7522', '1736-6038', '2228-0820']
DOI: https://doi.org/10.3176/proc.2021.2.04